A new method to measure the distance between the micro-device and the substrate

Satoshi Kishimoto; George C. Johnson

doi:10.1117/12.621892

12 April 2005 A new method to measure the distance between the micro-device and the substrate

Proceedings Volume 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics; (2005) https://doi.org/10.1117/12.621892
Event: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2004, -, Singapore

Abstract

A technique for measuring the distance between the micro-device and substrate is developed. An electron beam scan of a scanning electron microscope used for this method. A micro-device is placed over the substrate and obstructs the back-scattered electrons from the substrate. Therefore, the shadow image of the micro-device is observed in the SEM image. The distance between the micro-device and the substrate can be calculated using the width of the shadow, dimension of the detectors for the back-scattered electrons and the dimension of the micro-devices. This method makes it possible not only to measure the distance between the micro-device and the substrate and also detect the form of the specimen surface. In addition, observation of the micro-devices and measuring the distance between the micro-device and the substrate can perform at the same time. As a demonstration, the distance between the micro-bar and the substrate and the shape of the micro-hardness tester's indent mark is measured.

Citation Download Citation

Satoshi Kishimoto and George C. Johnson "A new method to measure the distance between the micro-device and the substrate", Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); https://doi.org/10.1117/12.621892

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KEYWORDS

Distance measurement

Scanning electron microscopy

Sensors

Electron beams

Electron microscopes

Experimental mechanics

Microelectromechanical systems

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