Second level printing of advanced phase shift masks using DUV laser lithography

Charles Howard; Keun-Taek Park; Marcus Scherer; Svetomir Stankovic; Rusty Cantrell; Mark Herrmann

doi:10.1117/12.617357

28 June 2005 Second level printing of advanced phase shift masks using DUV laser lithography

Charles Howard, Keun-Taek Park, Marcus Scherer, Svetomir Stankovic, Rusty Cantrell, Mark Herrmann

Proceedings Volume 5853, Photomask and Next-Generation Lithography Mask Technology XII; (2005) https://doi.org/10.1117/12.617357
Event: Photomask and Next Generation Lithography Mask Technology XII, 2005, Yokohama, Japan

Abstract

Laser lithography tools have been a staple in the photomask industry for second level printing for several years. This paper explores the overlay capabilities of the Alta4300D Deep UV (DUV) lithography system. The tool is manufactured by ETEC Systems, a part of the Mask Business Group of Applied Materials. The tool demonstrates good overlay performance, and an improved data path ensures the ability to handle large file sizes without an adverse impact on writing time. In addition to actual performance data on product masks, a simple analysis of the maximum total edge placement error of a hypothetical two level alt-PSM process is presented. The results show the tool is capable for many advanced phase shift overlay applications.

Citation Download Citation

Charles Howard, Keun-Taek Park, Marcus Scherer, Svetomir Stankovic, Rusty Cantrell, and Mark Herrmann "Second level printing of advanced phase shift masks using DUV laser lithography", Proc. SPIE 5853, Photomask and Next-Generation Lithography Mask Technology XII, (28 June 2005); https://doi.org/10.1117/12.617357

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available