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Proceedings Article

Modern approaches in phase measuring metrology (Invited Paper)

[+] Author Affiliations
James Millerd, Neal Brock, John Hayes, Brad Kimbrough, Matt Novak, Michael North-Morris

4D Technology Corp. (USA)

James C. Wyant

Optical Sciences Ctr./Univ. of Arizona (USA)

Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, 14 (August 03, 2005); doi:10.1117/12.621581
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From Conference Volume 5856

  • Optical Measurement Systems for Industrial Inspection IV
  • Wolfgang Osten; Christophe Gorecki; Erik L. Novak
  • Munich, Germany | June 13, 2005

abstract

The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and a special form of spatial carrier interferometry utilizing a micropolarizer phase-shifting array. In both techniques averaging can be used to reduce the effects of turbulence and the normal double frequency errors generally associated with phase-shifting interferometry.

© (2005) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

James Millerd ; Neal Brock ; John Hayes ; Brad Kimbrough ; Matt Novak, et al.
"Modern approaches in phase measuring metrology (Invited Paper)", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, 14 (August 03, 2005); doi:10.1117/12.621581; http://dx.doi.org/10.1117/12.621581


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