Confocal micro-optical distance sensor: realization and results

Peter Lucke; Arndt Last; Jurgen Mohr; Aiko K. Ruprecht; Christof Pruss; Hans J. Tiziani; Wolfgang Osten; Peter Lehmann; Sven Schonfelder

doi:10.1117/12.612418

13 June 2005 Confocal micro-optical distance sensor: realization and results

Peter Lucke, Arndt Last, Jurgen Mohr, Aiko K. Ruprecht, Christof Pruss, Hans J. Tiziani, Wolfgang Osten, Peter Lehmann, Sven Schonfelder

Author Affiliations +

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612418
Event: Optical Metrology, 2005, Munich, Germany

Abstract

In this paper, the realization and characterization of a microoptical sensor using the chromatic confocal principle is presented. The sensor head is designed for distance gauging applications in high aspect ratio cavities with a diameter of about 2 mm. The first part of this paper focuses on the design and fabrication process of the hybrid optical benches, which combines refractive and diffractive micro optical components. Very tight tolerances of the optical path are required for the functionality of the sensor. Therefore the alignment structures and mounts between the different optical elements are produced from PMMA using deep X-ray lithography, the first step of the LIGA process. In the second part of this paper the characterization of first prototypes using different light sources are described and results presented.

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Peter Lucke, Arndt Last, Jurgen Mohr, Aiko K. Ruprecht, Christof Pruss, Hans J. Tiziani, Wolfgang Osten, Peter Lehmann, and Sven Schonfelder "Confocal micro-optical distance sensor: realization and results", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612418

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