Wavefront reconstruction algorithms for the adaptive Shack-Hartmann sensor

Lars Seifert; Hans J. Tiziani; Wolfgang Osten

doi:10.1117/12.612544

13 June 2005 Wavefront reconstruction algorithms for the adaptive Shack-Hartmann sensor

Lars Seifert, Hans J. Tiziani, Wolfgang Osten

Proceedings Volume 5856, Optical Measurement Systems for Industrial Inspection IV; (2005) https://doi.org/10.1117/12.612544
Event: Optical Metrology, 2005, Munich, Germany

Abstract

The adaptive Shack-Hartmann sensor (ASHS) is a modifictaion of the conventional Shack Hartman sensor which uses a dynamic Liquid Crystal Display (LCD) in replacement of the static diffractive or refractive microlens array. The LCD is used to display an array of Fresnel microlenses. The microlenses can be adapted to the wavefront in order to enhance measurement accuracy and dynamic range. Because of the relatively large pixel of the LCD the size of the microlenses is larger than in a conventional sensor. The number of microlenses is limited by the resolution of the LCD and therefore smaller than in a conventional sensor. Certain considerations are required when restoring the wavefront phase values with the reconstruction algorithm. We present two matrix inversion reconstruction methods: The classic Zernike approach and a BSpline algorithm. We will compare these two methods on the basis of fit accuracy, reconstruction time and the effect of noise and missing data points.

Citation Download Citation

Lars Seifert, Hans J. Tiziani, and Wolfgang Osten "Wavefront reconstruction algorithms for the adaptive Shack-Hartmann sensor", Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); https://doi.org/10.1117/12.612544

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available