Novel 3D scanner based on electrostatically driven resonant micromirrors

Uwe Schelinski; Andeas Bergmann; Hans-Georg Dallmann; Christian Gerwig; Ljudmila Kleinmann; Hubert Lakner; Petra Nauber; Hannes Neumann; Michael Scholles; Alexander Wolter

doi:10.1117/12.616486

1 August 2005 Novel 3D scanner based on electrostatically driven resonant micromirrors

Uwe Schelinski, Andeas Bergmann, Hans-Georg Dallmann, Christian Gerwig, Ljudmila Kleinmann, Hubert Lakner, Petra Nauber, Hannes Neumann, Michael Scholles, Alexander Wolter

Author Affiliations +

Proceedings Volume 5873, Optical Scanning 2005; (2005) https://doi.org/10.1117/12.616486
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

This contribution presents a new scanning principle and device for 3-dimensional digital capturing and measurement of objects based on the triangulation method. The key elements are MOEMS, in particular electrostatically excited, harmonically oscillating micromechanical mirrors, which are useful means for light projection as well as for light detection. A configuration for capturing the trace of a static illumination is described, which applies a micro scanning mirror that oscillates in two axes. A synchronization method is proposed in order to apply micro scanning mirrors for both patterned illumination and light detection. For proving both techniques a test setup has been designed and assembled, and first results based on a static illumination are outlined.

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Uwe Schelinski, Andeas Bergmann, Hans-Georg Dallmann, Christian Gerwig, Ljudmila Kleinmann, Hubert Lakner, Petra Nauber, Hannes Neumann, Michael Scholles, and Alexander Wolter "Novel 3D scanner based on electrostatically driven resonant micromirrors", Proc. SPIE 5873, Optical Scanning 2005, (1 August 2005); https://doi.org/10.1117/12.616486

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