The network structure of the merit function space of EUV mirror systems

Oana Marinescu; Florian Bociort

doi:10.1117/12.614862

25 August 2005 The network structure of the merit function space of EUV mirror systems

Oana Marinescu, Florian Bociort

Proceedings Volume 5874, Current Developments in Lens Design and Optical Engineering VI; 587402 (2005) https://doi.org/10.1117/12.614862
Event: Optics and Photonics 2005, 2005, San Diego, California, United States

Abstract

The merit function space of mirror systems for EUV lithography is studied. Local minima situated in a multidimensional merit function space are connected via links that contain saddle points and form a network. In this work we present the first networks for EUV lithographic objectives and discuss how these networks change when control parameters, such as aperture and field are varied and constraints are used to limit the variation domain of the variables. A good solution in a network obtained with a limited number of variables has been locally optimized with all variables to meet practical requirements.

Citation Download Citation

Oana Marinescu and Florian Bociort "The network structure of the merit function space of EUV mirror systems", Proc. SPIE 5874, Current Developments in Lens Design and Optical Engineering VI, 587402 (25 August 2005); https://doi.org/10.1117/12.614862

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