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Proceedings Article

Generalized ellipsometry of complex mediums in layered systems

[+] Author Affiliations
Mathias Schubert, Alexander Kasic

Univ. Leipzig and Univ. of Nebraska/Lincoln (Germany)

Tino Hofmann

Univ. Leipzig and Univ. of Nebraska/Lincoln (USA)

Volker Gottschalch

Univ. Leipzig (Germany)

Juergen Off, Ferdinand Scholz

Univ. Stuttgart (Germany)

Eva Schubert, Horst Neumann

Institut fuer Oberflaechenmodifizierung (Germany)

Ian J. Hodgkinson, Matthew D. Arnold

Univ. of Otago (New Zealand)

Wayne A. Dollase

Univ. of California/Los Angeles and Univ. Bayreuth (USA)

Craig M. Herzinger

J.A. Woollam Co. (USA)

Proc. SPIE 4806, Complex Mediums III: Beyond Linear Isotropic Dielectrics, 264 (June 25, 2002); doi:10.1117/12.472993
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From Conference Volume 4806

  • Complex Mediums III: Beyond Linear Isotropic Dielectrics
  • Akhlesh Lakhtakia; Graeme Dewar; Martin W. McCall
  • Seattle, WA | July 07, 2002

abstract

A new global approach, called 'Generalized Ellipsometry', is now capable to characterize the optical and structural properties of general anisotropic layered systems, including absorption, and can be applied, in general, to determine the linear response tensor elements for wavelengths from the far IR to the deep UV. This technique enables new insights into physical phenomena of layered anisotropic mediums, and can provide precise structural and optical data of novel compound materials. Experimental results are presented for stibnite single crystals as example for an arbitrary biaxial absorbing material, a wurtzite GaN thin film with uniaxial anisotropy grown on sapphire, a spontaneously atomically ordered III-V semiconductor alloy thin film, and a sculptured titanium dioxide film with symmetrically dielectric tensor properties.

© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Mathias Schubert ; Alexander Kasic ; Tino Hofmann ; Volker Gottschalch ; Juergen Off, et al.
"Generalized ellipsometry of complex mediums in layered systems", Proc. SPIE 4806, Complex Mediums III: Beyond Linear Isotropic Dielectrics, 264 (June 25, 2002); doi:10.1117/12.472993; http://dx.doi.org/10.1117/12.472993


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