Preparations of Zr-rich PZT thin film on YBCO electrode and investigation of ferroelectric properties

Runling Peng; Ping Wu

doi:10.1117/12.444671

15 October 2001 Preparations of Zr-rich PZT thin film on YBCO electrode and investigation of ferroelectric properties

Runling Peng, Ping Wu

Proceedings Volume 4600, Advances in Microelectronic Device Technology; (2001) https://doi.org/10.1117/12.444671
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Pb(Zr_xTi_1-x)O₃(PZT) films have excellent ferroelectric, optical, piezoelectric and pyroelectric properties. We prepared PZT thin films by pulsed laser deposition (PLD). A pulsed 3321 mbar KrF excimer laser was used to ablate the bulk targets. In this work, sintered targets of Pb(Zr_0.94Ti_0.06)O₃ is used to deposit ferroelectric film onto YBCO and LAO underlayers at 570 degrees Celsius. The X-ray diffraction (XRD) pattern shows that the PZT film is of the perovskite structure having the remarkable (00k) orientation. The polarization-voltage (P-V) characteristic of the PZT thin film is measured by the Virtual Ground Mode. The remnant polarization and coercive field have been found to be P_r equals 4.7 (mu) C cm^-2 and V_c equals 0.4 V for Pt/YBCO/PZT/ALO.

Citation Download Citation

Runling Peng and Ping Wu "Preparations of Zr-rich PZT thin film on YBCO electrode and investigation of ferroelectric properties", Proc. SPIE 4600, Advances in Microelectronic Device Technology, (15 October 2001); https://doi.org/10.1117/12.444671

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