Paper
30 August 2005 Radiation damages to amorphous-carbon optical coatings
L. Juha, M. Bittner, M. De Grazia, J. Feldhaus, J. Gaudin, S. Guizard, S. Jacobi, M. Kozlova, J. Krasa, J. Krzywinski, H. Merdji, C. Michaelsen, T. Mocek, R. Nietubyc, M. Jurek, J. Polan, A. R. Prag, B. Rus, R. Sobierajski, B. Steeg-Keitel, M. Stoermer, M. Stupka, V. Vorlicek, J. Wiesmann, J. Wild
Author Affiliations +
Abstract
The multi-mJ, 21-nm soft-x-ray laser at the PALS facility was focused on the surface of amorphous carbon (a-C) coating, developed for heavily loaded XUV/x-ray optical elements. AFM (Atomic Force Microscopy) images show 3-micrometer expansion of the irradiated material. Raman spectra, measured with an Ar+ laser microbeam in both irradiated and unirradiated areas, confirm a high degree of graphitization in the irradiated layer. In addition to this highfluence (~ 1 J/cm2), single-shot experiment, it was necessary to carry out an experiment to investigate consequences of prolonged XUV irradiation at relatively low fluence. High-order harmonic (HH) beam generated at the LUCA facility in CEA/Saclay Research Center was used as a source of short-wavelength radiation delivering high-energy photons on the surface at a low single-shot fluence but with high-average power. a-C irradiated at a low fluence, i.e., < 0.1 mJ/cm2 by many HH shots exhibits an expansion for several nanometers. Although it is less dramatic change of surface morphology than that due to single-hot x-ray-laser exposure even the observed nanometer-sized changes caused by the HH beam on a-C surface could influence reflectivity of a grazing incidence optical element. These results seem to be important for estimating damages to the surfaces of highly irradiated optical elements developed for guiding and focusing the ultraintense XUV/x-ray beams provided by new generation sources (i.e., VUV FEL and XFEL in Hamburg; LCLS in Stanford) because, up to now, only melting and vaporization, but not graphitization, have been taken into account.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
L. Juha, M. Bittner, M. De Grazia, J. Feldhaus, J. Gaudin, S. Guizard, S. Jacobi, M. Kozlova, J. Krasa, J. Krzywinski, H. Merdji, C. Michaelsen, T. Mocek, R. Nietubyc, M. Jurek, J. Polan, A. R. Prag, B. Rus, R. Sobierajski, B. Steeg-Keitel, M. Stoermer, M. Stupka, V. Vorlicek, J. Wiesmann, and J. Wild "Radiation damages to amorphous-carbon optical coatings", Proc. SPIE 5917, Fourth Generation X-Ray Sources and Optics III, 59170F (30 August 2005); https://doi.org/10.1117/12.617125
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Cited by 5 scholarly publications.
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KEYWORDS
Raman spectroscopy

Optical coatings

Atomic force microscopy

Free electron lasers

Extreme ultraviolet

Zinc

Carbon

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