Paper
23 December 2002 A fly's eye condenser system for uniform illumination
Blake G. Crowther, Donald G. Koch, Joseph M. Kunick, James P. McGuire Jr., Robert Harned, Richard A. Gontin
Author Affiliations +
Proceedings Volume 4832, International Optical Design Conference 2002; (2002) https://doi.org/10.1117/12.486462
Event: International Optical Design Conference 2002, 2002, Tucson, AZ, United States
Abstract
We recently completed a preliminary design of a novel illumination system. The concept of this design is to integrate the incident irradiance from a small source such that an otherwise non-uniformly iluminated target is uniformly illuminated, while maintaining high radiometric throughput. Our design incorporates a collector to efficiently gather flux from the source, two multi-element faceted arrays, and a flux relay. We explore the concept behind our design and show a preferred embodiment and its predicted peformance.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Blake G. Crowther, Donald G. Koch, Joseph M. Kunick, James P. McGuire Jr., Robert Harned, and Richard A. Gontin "A fly's eye condenser system for uniform illumination", Proc. SPIE 4832, International Optical Design Conference 2002, (23 December 2002); https://doi.org/10.1117/12.486462
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Cited by 9 scholarly publications.
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KEYWORDS
Eye

Mirrors

Fiber optic illuminators

Extreme ultraviolet

Projection systems

Extreme ultraviolet lithography

Reticles

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