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Proceedings Article

A fly's eye condenser system for uniform illumination

[+] Author Affiliations
Blake G. Crowther, Joseph M. Kunick, James P. McGuire, Jr.

Optical Research Associates (USA)

Donald G. Koch

D.G.K. Optical Design and Engineering, Inc. (USA)

Robert Harned

Silicon Valley Group (USA)

Richard A. Gontin

ASML (USA)

Proc. SPIE 4832, International Optical Design Conference 2002, 302 (December 1, 2002); doi:10.1117/12.486462
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From Conference Volume 4832

  • International Optical Design Conference 2002
  • Paul K. Manhart; Jose M. Sasian
  • Tucson, AZ | June 03, 2002

abstract

We recently completed a preliminary design of a novel illumination system. The concept of this design is to integrate the incident irradiance from a small source such that an otherwise non-uniformly iluminated target is uniformly illuminated, while maintaining high radiometric throughput. Our design incorporates a collector to efficiently gather flux from the source, two multi-element faceted arrays, and a flux relay. We explore the concept behind our design and show a preferred embodiment and its predicted peformance.

© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Blake G. Crowther ; Donald G. Koch ; Joseph M. Kunick ; James P. McGuire, Jr. ; Robert Harned, et al.
"A fly's eye condenser system for uniform illumination", Proc. SPIE 4832, International Optical Design Conference 2002, 302 (December 1, 2002); doi:10.1117/12.486462; http://dx.doi.org/10.1117/12.486462


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