Paper
19 October 2005 Comparison of different magnetorheological polishing fluids
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Abstract
Magnetorheological Finishing (MRF) is commonly used to finish high quality optical surfaces. The process is based on a magnetorheological fluid, which stiffens in a magnetic field and thus may be used as a polishing tool. The fluid removal characteristic depends on several parameters, for example the magnetic field strength or the relative velocity between workpiece and polishing tool. Another parameter is the fluid itself. Different compositions of polishing abrasives result in different removal characteristics. At the University of Applied Sciences Deggendorf, five different magnetorheological polishing fluids have been analysed. The results of the research are scanning electron microscope analyses as well as spectra analyses. The removal characteristic for each fluid has been determined for different glass materials. Finally, the fluid conditions during polishing have been analysed. For this purpose, the fluid flow rate, the fluid pressure and the fluid viscosity have been investigated.
© (2005) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Markus Schinhaerl, Elmar Pitschke, Andreas Geiss, Rolf Rascher, Peter Sperber, Richard Stamp, Lyndon Smith, and Gordon Smith "Comparison of different magnetorheological polishing fluids", Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596528 (19 October 2005); https://doi.org/10.1117/12.656430
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Cited by 9 scholarly publications.
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KEYWORDS
Microfluidics

Cerium

Diamond

Particles

Polishing

Iron

Oxides

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