MOEMS for environmental applications: real-time air pollution monitoring system using chemo-optical sensor

Mira Caldararu; A. Vasile; F. Craciunoiu; Dana Cristea; Anca Paraschiv; F. Caldararu

doi:10.1117/12.639740

14 December 2005 MOEMS for environmental applications: real-time air pollution monitoring system using chemo-optical sensor

Mira Caldararu, A. Vasile, F. Craciunoiu, Dana Cristea, Anca Paraschiv, F. Caldararu

Author Affiliations +

Proceedings Volume 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II; 59720U (2005) https://doi.org/10.1117/12.639740
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 2004, Bucharest, Romania

Abstract

Air pollution monitoring needs real-time measurement systems for low pollutant concentration levels. The authors have designed and manufactured an experimental integrated chemo-optical sensor on silicon containing a sol-gel layer, a silicon nitride waveguide and a silicon photodiode. This sensor was included in a measurement system, which has its own microcontroller for data acquisition and an autonomous power supply. The measured data are calculated and managed when the microcontroller is serially connected to the computer, dedicated software being performed. In this way, the "classical" laboratory equipment for air pollution measurements can be replaced by an autonomous real-time measurement system.

Citation Download Citation

Mira Caldararu, A. Vasile, F. Craciunoiu, Dana Cristea, Anca Paraschiv, and F. Caldararu "MOEMS for environmental applications: real-time air pollution monitoring system using chemo-optical sensor", Proc. SPIE 5972, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies II, 59720U (14 December 2005); https://doi.org/10.1117/12.639740

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