Melted microlenses: fabrication, performance, and modeling

Feidhlim T. O'Neill; John T. Sheridan; Sumiyoshi Abe

doi:10.1117/12.464072

27 August 2003 Melted microlenses: fabrication, performance and modeling

Feidhlim T. O'Neill, John T. Sheridan, Sumiyoshi Abe

Proceedings Volume 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications; (2003) https://doi.org/10.1117/12.464072
Event: OPTO Ireland, 2002, Galway, Ireland

Abstract

We present a two part study of melted microlens arrays. This first part concentrates on the production and measurement of microlens arrays while the second part examines attempts to model the microlens profiles. Particular emphasis is placed on the photoresist reflow method of microlens production that was suggested by Popovic et al., as this was the method used to produce the microlens examined in this study. Lenses produced using this method can have large deviations from the spherical case, i.e. the profile that would be expected from a simple minimisation of the surface energy. These deviations have not been explained to date in the literature, however a number of possible causes for this deviation are given in this paper. Therefore the fundamental questions we wish to explore here are: (1) Why physically do dips occur? and (2) Can the resulting surface profile be predicted? Any model developed to quantitatively estimate the optical effects of surface shape will depend on the physical assumptions made regarding the surface formation mechanism. A number of possible causes are listed in this paper. The second part of this study attempts to model microlens surface profiles are discussed. The models used are analytic models. These models are examined for a range of different f numbers, f/#, and used to fit the experimental data discussed. A comparison of the models is made.

Citation Download Citation

Feidhlim T. O'Neill, John T. Sheridan, and Sumiyoshi Abe "Melted microlenses: fabrication, performance and modeling", Proc. SPIE 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications, (27 August 2003); https://doi.org/10.1117/12.464072

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