Characterization and characteristics of a ULE glass tailored for EUVL needs

Kenneth E. Hrdina; Benjamin Z. Hanson; Philip M. Fenn; Robert Sabia

doi:10.1117/12.472321

1 July 2002 Characterization and characteristics of a ULE glass tailored for EUVL needs

Kenneth E. Hrdina, Benjamin Z. Hanson, Philip M. Fenn, Robert Sabia

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472321
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The EUVL industry has unique material requirements, which are being addressed. Implementation of metrology methods new to ULE Glass will be discussed along with material characteristics altered to meet the needs of EUVL. Metrology methods include multiple means of evaluating the striae, CTE and inclusions. Material characteristics have been altered to better meet the demands of the industry. The reduction in inclusion levels along with other improvements such as in the area of striae will be discussed here. Improvements of greater than 4x were achieved in these preliminary striae reduction trials.

Citation Download Citation

Kenneth E. Hrdina, Benjamin Z. Hanson, Philip M. Fenn, and Robert Sabia "Characterization and characteristics of a ULE glass tailored for EUVL needs", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472321

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