Manufacture of fly-eye mirror in an extreme-ultraviolet lithography illumination system by means of ultraprecision diamond cutting

Yoshinori Hashimoto; Yoshimi Takeuchi; Tomohiko Kawai; Kiyoshi Sawada; Hideo Takino; Norio Shibata

doi:10.1117/12.472341

1 July 2002 Manufacture of fly-eye mirror in an extreme-ultraviolet lithography illumination system by means of ultraprecision diamond cutting

Yoshinori Hashimoto, Yoshimi Takeuchi, Tomohiko Kawai, Kiyoshi Sawada, Hideo Takino, Norio Shibata

Author Affiliations +

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472341
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

This study deals with the manufacture of so-called Fly-eye mirror in EUV lithography by means of an ultraprecision 5-axis control milling technology. It is extremely difficult to manufacture a highly accurate Fly-eye mirror by conventional methods such as photolithography, mechanical cutting by a lathe, etc. since it is composed of 500 circular arc mirror elements of 15 mm in length and 1 mm in width having a spherical surface of 295 mm in radius, and there are minute steps among them. In order to manufacture Fly-eye mirror with accuracy and efficiency, the study proposes a new machining method to manufacture spherical surface with any radius by employing a rotational single-crystal diamond tool with cutting edge angle of 90 degree. Oxygen-free copper was machined by this method. The machined workpiece shows smooth spherical surface and sharp steps among them without any burrs. It is found that the proposed method has the potential of producing the Fly-eye mirror.

Citation Download Citation

Yoshinori Hashimoto, Yoshimi Takeuchi, Tomohiko Kawai, Kiyoshi Sawada, Hideo Takino, and Norio Shibata "Manufacture of fly-eye mirror in an extreme-ultraviolet lithography illumination system by means of ultraprecision diamond cutting", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472341

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