Aspherical mirror measurement using a point diffraction interferometer

Kazuya Ota; Takahiro Yamamoto; Yusuke Fukuda; Katsura Otaki; Iwao Nishiyama; Shinji Okazaki

doi:10.1117/12.472343

1 July 2002 Aspherical mirror measurement using a point diffraction interferometer

Kazuya Ota, Takahiro Yamamoto, Yusuke Fukuda, Katsura Otaki, Iwao Nishiyama, Shinji Okazaki

Proceedings Volume 4688, Emerging Lithographic Technologies VI; (2002) https://doi.org/10.1117/12.472343
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

An point diffraction interferometry (PDI) system is used for measurement of EUV aspherical mirrors, because diffracted light by a small aperture has a nearly ideal spherical wavefront and EUV projection systems is designed with mild aspheres so that the mirrors can be tested at the center curvature without null optics. An advanced point diffraction interferometer has been developed and its precision and accuracy performance tested with a spherical mirror have been reported in last year1. After that, the diameter of the pinhole employed in the PDI system is switched from 1.0mm to 0.5mm in anticipation of measurement accuracy improvement. An aspherical mirror is measured, and the system error is estimated from the aspherical measurement data. In this system error estimation, an aspherical mirror designed for a four-mirrors EUV projection optics is used.

Citation Download Citation

Kazuya Ota, Takahiro Yamamoto, Yusuke Fukuda, Katsura Otaki, Iwao Nishiyama, and Shinji Okazaki "Aspherical mirror measurement using a point diffraction interferometer", Proc. SPIE 4688, Emerging Lithographic Technologies VI, (1 July 2002); https://doi.org/10.1117/12.472343

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available