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Proceedings Article

Direct to digital holography for semiconductor wafer defect detection and review

[+] Author Affiliations
C. E. Thomas, Jr., Tracy M. Bahm, Steven W. Burns, Long Dai, Robert J. Delahanty, Christopher J. Doti, Ayman El-Khashab, Robert L. Fisher, Judd M. Gilbert, Joel D. Hickson, Martin A. Hunt, George C. John, Michael L. Jones, Ken R. Macdonald, Michael W. Mayo, Ian McMackin, John H. Price, Louis J. Schaefer, Thomas R. Scheidt, Mark A. Schulze, Philip D. Schumaker, Bichuan Shen, Randall G. Smith, Allen N. Su, William R. Usry, Edgar Voelkl, Karsten S. Weber, Paul G. Jones, Robert W. Owen

nLine Corp. (USA)

Larry R. Baylor, Philip R. Bingham, Matt Chidley, James S. Goddard, Jr., Gregory R. Hanson, Kathy W. Hylton, Dave R. Patek, David A. Rasmussen, Kenneth W. Tobin, Jr.

Oak Ridge National Lab. (USA)

Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, 180 (July 11, 2002); doi:10.1117/12.475659
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From Conference Volume 4692

  • Design, Process Integration, and Characterization for Microelectronics
  • Alexander Starikov; Kenneth W. Tobin, Jr.
  • Santa Clara, CA | March 06, 2002

abstract

A method for recording true holograms directly to a digital video medium in a single image has been invented. This technology makes the amplitude and phase for every pixel of the target object wave available. Since phase is proportional wavelength, this makes high-resolution metrology an implicit part of the holographic recording. Measurements of phase can be made to one hundredth or even one thousandth of a wavelength, so the technology is attractive for dining defects on semiconductor wafers, where feature sizes are now smaller than the wavelength of even deep UV light.

© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

C. E. Thomas, Jr. ; Tracy M. Bahm ; Larry R. Baylor ; Philip R. Bingham ; Steven W. Burns, et al.
"Direct to digital holography for semiconductor wafer defect detection and review", Proc. SPIE 4692, Design, Process Integration, and Characterization for Microelectronics, 180 (July 11, 2002); doi:10.1117/12.475659; http://dx.doi.org/10.1117/12.475659


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