Reflection moiré for high spatial resolution

Hisatoshi Fujiwara; Yukitoshi Otani; Toru Yoshizawa

doi:10.1117/12.467398

18 October 2002 Reflection moire for high spatial resolution

Hisatoshi Fujiwara, Yukitoshi Otani, Toru Yoshizawa

Proceedings Volume 4902, Optomechatronic Systems III; (2002) https://doi.org/10.1117/12.467398
Event: Optomechatronic Systems III, 2002, Stuttgart, Germany

Abstract

A new technique is proposed to keep a high spatial resolution when using both a reflection moire and using an integrating-bucket phase shifting method. In moire method an image includes high spatial frequency components of the gratings and the second harmonics of them besides moire fringe. These high frequency components cause measurement error when using phase shifting technique. By combining these two methods for a reflection moire we realized to eliminate both the high frequency components of gratings and the second harmonics of them with keeping high-speed measurement. We proved that theory of the new technique and good experimental results.

Citation Download Citation

Hisatoshi Fujiwara, Yukitoshi Otani, and Toru Yoshizawa "Reflection moire for high spatial resolution", Proc. SPIE 4902, Optomechatronic Systems III, (18 October 2002); https://doi.org/10.1117/12.467398

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available