Nonlinear error of common-path laser heterodyne interferometer

Huijie Zhao; Guangjun Zhang

doi:10.1117/12.445635

22 October 2001 Nonlinear error of common-path laser heterodyne interferometer

Huijie Zhao, Guangjun Zhang

Proceedings Volume 4401, Recent Developments in Traceable Dimensional Measurements; (2001) https://doi.org/10.1117/12.445635
Event: Lasers in Metrology and Art Conservation, 2001, Munich, Germany

Abstract

The setup of the common-path laser heterodyne interferometer (CLHI) with Wollaston Prism is introduced. The nonlinear error of this CLHI is frequency mixing. The concept of frequency mixing and the general principle of nonlinear error are studied by vector and interference theory. The error sources in the interferometer are the orientation of Wollaston Prism and metal mirror. When the polarization direction of the laser beam is not parallel to the axis of Wollaston prism, frequency mixing occurred in the output light. The vector of interference signal of the system is analyzed and the equation of nonlinear error is given. The law of the error is studied. On the other hand, the metal reflection theory is used to study the eccentricity and orientation error in the reflected light of linear polarized laser from metal mirror. Then the vector theory is used to determine the frequency mixing vector of the two reflected beams. The formula of the interference signal and nonlinear error are concluded. The simulation error is presented. Finally, the error compensation methods are discussed. The results of the research show that it is of great importance to improve the accuracy of heterodyne interferometer.

Citation Download Citation

Huijie Zhao and Guangjun Zhang "Nonlinear error of common-path laser heterodyne interferometer", Proc. SPIE 4401, Recent Developments in Traceable Dimensional Measurements, (22 October 2001); https://doi.org/10.1117/12.445635

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