Micromachined cochlear-like acoustic sensor

Robert D. White; Karl Grosh

doi:10.1117/12.475020

11 July 2002 Micromachined cochlear-like acoustic sensor

Robert D. White, Karl Grosh

Proceedings Volume 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology; (2002) https://doi.org/10.1117/12.475020
Event: SPIE's 9th Annual International Symposium on Smart Structures and Materials, 2002, San Diego, California, United States

Abstract

The mammalian cochlea achieves remarkable acoustic transduction characteristics in a compact and robust design. For this reason, its mechanics have been extensively studied, both mathematically and experimentally. Recently, a number of researchers have attempted to mimic the cochlear function of the basilar membrane in micromachined mechanical devices. This paper presents a design for a silicon cochlea which extends previous work by utilizing a micromachined liquid-filled two duct structure similar to the duct structure of the biological cochlea. Design issues related to both mechanical structure and electrical transduction will be discussed, particularly with regard to optimization of transducer performance. A parallel beam array structure is proposed as a model for an orthotropic membrane. Fabrication procedures and results are also presented. Challenging Fabrication issues related to through-wafer etching, adhesive wafer bonding, device release, and fluid injection are emphasized.

Citation Download Citation

Robert D. White and Karl Grosh "Micromachined cochlear-like acoustic sensor", Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology, (11 July 2002); https://doi.org/10.1117/12.475020

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