Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators

Zhanjie Wang; Ryutaro Maeda; Hiroyuki Kokawa

doi:10.1117/12.425390

5 April 2001 Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators

Zhanjie Wang, Ryutaro Maeda, Hiroyuki Kokawa

Author Affiliations +

Proceedings Volume 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001; (2001) https://doi.org/10.1117/12.425390
Event: Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, 2001, Cannes-Mandelieu, France

Abstract

Ferroelectric films of lead zirconate titanate (PZT) are currently attracting attention because of the large number of potential application in micro actuators, such as micro- mirror, micro-pump and multi-probe cantilever of AFM. In this study, thin films of Pb (Zr_0.52Ti_0.48) O₃ (PZT) 1.8 to approximately 2.0 micrometer thick on a Pt/Ti/SiO₂/Si substrate were prepared by excimer laser ablation and were crystallized by subsequent annealing. Crystalline phases in the PZT films were investigated by X-ray diffraction analysis (XRD). The microstructure and composition of the films were studied by scanning electron microscopy (SEM) and electron probe microanalysis (EPMA), respectively. The effect of the Pb content of the target on electrical properties of PZT thin films was investigated. The PZT films with a well- crystallized perovskite phase were obtained by adding 20 wt % excess PbO to the target and annealing at 750 degrees Celsius for 90 min. The remanent polarization and the coercive field of this 0.8 micrometer think film were 23.6 (mu) C/cm² and 60.0 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 935 and 0.04, respectively. Our results demonstrate that a few micrometers thick PZT thin films derived by laser ablation for use in micro actuators is possible.

Citation Download Citation

Zhanjie Wang, Ryutaro Maeda, and Hiroyuki Kokawa "Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators", Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); https://doi.org/10.1117/12.425390

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