Self-reference method for phase-shift interferometry

Zongtao Ge; Mitsuo Takeda

doi:10.1117/12.427037

8 May 2001 Self-reference method for phase-shift interferometry

Zongtao Ge, Mitsuo Takeda

Proceedings Volume 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001); (2001) https://doi.org/10.1117/12.427037
Event: Optical Engineering for Sensing and Nanotechnology (ICOSN '01), 2001, Yokohama, Japan

Abstract

A self-reference method (SRM) is proposed to realize high precision fringe analysis for phase-shifting interferometry when translation and tilt errors exist in phase shifters. In this method, arbitrary pixel-dependent phase shifts including those caused by tilt are directly estimated from a single interferogram by the Fourier transform method without using any extra reference mirror. The obtained phase shifts are then used to reconstruct the original wave front according to the algorithm of the proposed self-reference method. Computer simulations demonstrate the feasibility of the proposed method. Precision of shifted phases and tilts estimation is also evaluated, and some error sources are analyzed. It is shown that the self-reference 3-step method can give better accuracy than that of the popular 5-step method even when the tilt error exists in the reference surface.

Citation Download Citation

Zongtao Ge and Mitsuo Takeda "Self-reference method for phase-shift interferometry", Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); https://doi.org/10.1117/12.427037

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