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Proceedings Article

Nano-stepper-driven optical shutter for applications in free-space micro-optics

[+] Author Affiliations
Justyna Zawadzka, Lijie Li, Anartz Unamuno, Deepak G. Uttamchandani

Univ. of Strathclyde (United Kingdom)

Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, 50 (September 10, 2002); doi:10.1117/12.483194
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From Conference Volume 4928

  • MEMS/MOEMS Technologies and Applications
  • Guofan Jin; John S. McKillop; Kazuhiro Hane
  • Shanghai, China | October 14, 2002


In this paper we report a simple design of a micro-optical shutter/attenuator. The standard MUMPS process was used to fabricate the device. A vertically erected, gold-coated, 200x300 mm side length micro-mirror was precisely placed between the end faces of two closely spaced optical fibers. The position of the micro-mirror with respect to the optical fiber end face was controlled by a nano-stepping motor array. Optical and mechanical tests were performed on the device. A 1.55 mm laser beam was sent along the optical fiber. When the micro-mirror was removed from the front of the fiber, the coupling efficiency between two fibers was -10 dBm. Once the micro-mirror was placed in the optical path the coupling efficiency dropped to -51.5 dBm. The best attenuation was obtained when the micro-mirror blocked the whole cross-section of the laser beam diameter. It is evident that the device can operate as a high precision fiber optic attenuator or shutter.

© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.

Justyna Zawadzka ; Lijie Li ; Anartz Unamuno and Deepak G. Uttamchandani
"Nano-stepper-driven optical shutter for applications in free-space micro-optics", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, 50 (September 10, 2002); doi:10.1117/12.483194; http://dx.doi.org/10.1117/12.483194

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