Error-compensation technology to deal with axis misalignment of multi MEMS sensors

Rong Zhu; Zhaoying Zhou

doi:10.1117/12.483149

10 September 2002 Error-compensation technology to deal with axis misalignment of multi MEMS sensors

Rong Zhu, Zhaoying Zhou

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483149
Event: Photonics Asia, 2002, Shanghai, China

Abstract

As micro electro-mechanical system (MIEMS) technology matures as an industry, the integration of standard integrated circuit and multi-MEMS-sensors will continue to increase. When assembling multi-sensors into a micro electro-mechanical system, usually exists axis-misalignment problem, which will inevitably induce large measurement error. This paper proposes an error compensation scheme based on optical alignment for solving this problem. A functional explanation is followed by a brief description of the optical layout. The computation including investigation and compensation to the axis-misalignment is covered later. Finally tests are conducted with a micro electro-mechanical azimuth-level detector to prove the validity of the method.

Citation Download Citation

Rong Zhu and Zhaoying Zhou "Error-compensation technology to deal with axis misalignment of multi MEMS sensors", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483149

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