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Proceedings Article

Optical near-field effects in surface nanostructuring and laser cleaning

[+] Author Affiliations
H.-J. Muenzer, M. Bertsch, Oliver Dubbers, B.-U. Runge, Paul Leiderer

Univ. Konstanz (Germany)

Mario Mosbacher

Univ. Konstanz and Johannes-Kepler-Univ. (Germany)

F. Burmeister

Fraunhofer Institute for Mechanics of Materials (Germany)

A. Pack, Reinhold Wannemacher

Chemnitz Univ. of Technology (Germany)

Dieter Baeuerle

Johannes-Kepler-Univ. (Austria)

Johannes Boneberg

Univ. Konstanz (Switzerland)

Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, 180 (February 19, 2002); doi:10.1117/12.456827
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From Conference Volume 4426

  • Second International Symposium on Laser Precision Microfabrication
  • Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski
  • Singapore, Singapore | May 16, 2001

abstract

We present a method for directly imaging the undisturbed near field of a particle resting on a surface. A comparison with numerical computations shows good agreement with the results of our experiments. These results have important consequences for laser-assisted particle removal where field enhancement may cause local surface damage and is one of the physical key processes in this cleaning method. On the other hand, the application of near fields at particles allows structuring of surfaces with structure dimensions in the order of 100 nm and even below.

© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

H.-J. Muenzer ; Mario Mosbacher ; M. Bertsch ; Oliver Dubbers ; F. Burmeister, et al.
"Optical near-field effects in surface nanostructuring and laser cleaning", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, 180 (February 19, 2002); doi:10.1117/12.456827; http://dx.doi.org/10.1117/12.456827


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