The development of characterization tools for the deep-ultraviolet
(DUV)/vacuum-ultraviolet (VUV) spectral range gains of increasing importance considering the applicability of optics in adequate facilities. At the Laser Zentrum Hannover, procedures for the
investigation of optical parameters, i.e. transmittance, reflectance, absorption and scattering, are developed. In the last two years, a spectrophotometric unit was redesigned allowing a comprehensive characterization of optical components in the wavelength range between 115nm and 310nm. The paper describes the developed device in detail and discusses the sources of error with regard to their influence on measured data. Different investigations were performed and are presented in dependence on the wavelength, the adjusted angle of incidence (AOI) and the polarization of the incident beam. Furthermore, numerous measuring methods are explained which are supported by the in-house compiled software package.© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.