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Proceedings Article

DUV/VUV spectrophotometry for high-precision spectral characterization

[+] Author Affiliations
Holger Blaschke, J’rgen Kohlhaas, Puja Kadkhoda, Detlev Ristau

Laser Zentrum Hannover e.V. (Germany)

Proc. SPIE 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, 536 (May 28, 2003); doi:10.1117/12.472387
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From Conference Volume 4932

  • Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization
  • Gregory J. Exarhos; Arthur H. Guenther; Norbert Kaiser; Keith L. Lewis; M. J. Soileau; Christopher J. Stolz; Adolf Giesen; Horst Weber
  • Boulder, CO | September 16, 2002

abstract

The development of characterization tools for the deep-ultraviolet (DUV)/vacuum-ultraviolet (VUV) spectral range gains of increasing importance considering the applicability of optics in adequate facilities. At the Laser Zentrum Hannover, procedures for the investigation of optical parameters, i.e. transmittance, reflectance, absorption and scattering, are developed. In the last two years, a spectrophotometric unit was redesigned allowing a comprehensive characterization of optical components in the wavelength range between 115nm and 310nm. The paper describes the developed device in detail and discusses the sources of error with regard to their influence on measured data. Different investigations were performed and are presented in dependence on the wavelength, the adjusted angle of incidence (AOI) and the polarization of the incident beam. Furthermore, numerous measuring methods are explained which are supported by the in-house compiled software package.

© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Holger Blaschke ; J’rgen Kohlhaas ; Puja Kadkhoda and Detlev Ristau
"DUV/VUV spectrophotometry for high-precision spectral characterization", Proc. SPIE 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, 536 (May 28, 2003); doi:10.1117/12.472387; http://dx.doi.org/10.1117/12.472387


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