Synthesis of pure C40 TiSi2 for Si wafer fabrication

S. Y. Chen; Zexiang Shen; S. Y. Xu; Alex K. See; Lap Hung Chan; Wen Shen Li

doi:10.1117/12.456893

25 February 2002 Synthesis of pure C40 TiSi₂ for Si wafer fabrication

S. Y. Chen, Zexiang Shen, S. Y. Xu, Alex K. See, Lap Hung Chan, Wen Shen Li

Proceedings Volume 4426, Second International Symposium on Laser Precision Microfabrication; (2002) https://doi.org/10.1117/12.456893
Event: Second International Symposium on Laser Precision Micromachining, 2001, Singapore, Singapore

Abstract

A simple and novel salicidation process applying pulsed laser annealing as the first annealing step was used to induce TiSi₂ formation. Both Raman spectroscopy and transmission electron microscope results confirm the formation of a new phase of Ti disilicide, the pure C40 TiSi₂ after laser irradiation. Direct C54 phase growth on the basis of C40 template bypassing the C49 phase is accomplished at the second annealing temperature as low as 600 degree(s)C. Line width independent formation of the C54 phase was observed on patterned wafers using this salicidation process and fine line effect is thus eliminated.

Citation Download Citation

S. Y. Chen, Zexiang Shen, S. Y. Xu, Alex K. See, Lap Hung Chan, and Wen Shen Li "Synthesis of pure C40 TiSi₂ for Si wafer fabrication", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, (25 February 2002); https://doi.org/10.1117/12.456893

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available