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Proceedings Article

Laser cleaning technology and its application

[+] Author Affiliations
Wen D. Song, Minghui Hong, L. Zhang, Tow Chong Chong

Data Storage Institute (Singapore)

Yongfeng Lu

Data Storage Institute (USA)

Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, 280 (February 19, 2002); doi:10.1117/12.456839
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From Conference Volume 4426

  • Second International Symposium on Laser Precision Microfabrication
  • Isamu Miyamoto; Yong Feng Lu; Koji Sugioka; Jan J. Dubowski
  • Singapore, Singapore | May 16, 2001

abstract

Laser cleaning technology has been demonstrated to be an effective cleaning technique for removing particulate and film-type contaminants from solid surfaces in this paper. Dry and steam laser cleaning mechanisms and applications in semiconductor and disk drive industry will be addressed.

© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Wen D. Song ; Minghui Hong ; L. Zhang ; Yongfeng Lu and Tow Chong Chong
"Laser cleaning technology and its application", Proc. SPIE 4426, Second International Symposium on Laser Precision Microfabrication, 280 (February 19, 2002); doi:10.1117/12.456839; http://dx.doi.org/10.1117/12.456839


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