0

Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Laser radiometry for UV lasers at 193 nm

[+] Author Affiliations
Stefan Kueck, Klaus Liegmann, Klaus Moestl, Friedhelm Brandt, Juergen Metzdorf

Physikalisch-Technische Bundesanstalt (Germany)

Proc. SPIE 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, 645 (May 28, 2003); doi:10.1117/12.472004
Text Size: A A A
From Conference Volume 4932

  • Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization
  • Gregory J. Exarhos; Arthur H. Guenther; Norbert Kaiser; Keith L. Lewis; M. J. Soileau; Christopher J. Stolz; Adolf Giesen; Horst Weber
  • Boulder, CO | September 16, 2002

abstract

A setup for the measurement and calibration of laser power at the excimer laser wavelength of 193 nm was realized. The investigations include the measurements of the damage threshold and the determination of the effective spectral reflectance of the material used for the standard detector, named LM4. The results of these studies allow the complete characterization of the LM4 standard detector including an uncertainty analysis according to the "Guide to the Expression of Uncertainty in Measurement." The LM4 standard detector is linked to the calibration chain established at the Physikalisch-Technische Bundesanstalt (PTB), the German National Metrology Institute. Furthermore, two transfer detectors were linked to the LM4 at the wavelength of 193 nm. Calibrations can be performed down to 193 nm with a relative expanded uncertainty (k = 2) below 1.6 %. Maximum average power, for which calibrations can be performed, is 2.8 W at a repetition rate of 200 Hz. An outlook for the calibration of the laser power at 157 nm is given.

© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Stefan Kueck ; Klaus Liegmann ; Klaus Moestl ; Friedhelm Brandt and Juergen Metzdorf
"Laser radiometry for UV lasers at 193 nm", Proc. SPIE 4932, Laser-Induced Damage in Optical Materials: 2002 and 7th International Workshop on Laser Beam and Optics Characterization, 645 (May 28, 2003); doi:10.1117/12.472004; http://dx.doi.org/10.1117/12.472004


Access This Article
Sign In to Access Full Content
Please Wait... Processing your request... Please Wait.
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
 

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


Buy this article ($18 for members, $25 for non-members).
Sign In