By using modern wave optical design methods elements and systems with complex optical functions, such as beam shapers or phase correctors can be calculated. Often the positioning of the optical elements to each other and to the optical beam axis is extremely critical and requires a considerable effort during assembly. We demonstrate two fabrication methods suitable for the high precision wafer- scale realization of complex microoptical systems comprising different optical functions. These methods are the combination of different optical functions by a special laser lithographic writing technique on reflow lenses and a double sided UV-replication technique. The method is demonstrated by an example system consisting of a single- mode fiber collimation, a beam shaping and a phase correction function.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.