We made a form birefringent micro-retarder array for the real-time imaging polarimetry. The polarimetry system is composed of an imaging lens, the retarder array, a polarization film, and an image sensor. We fabricated a 92x70 retarder array by the electron-beam lithography and the reactive ion etching. Each retarder was a TiO2 subwavelength grating of 0.15(mu) nm in a period on a silica substrate. Some polarization images of four Stokes parameters were obtained with the polarimetry system.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.