Generation of MEMS component models using Cosserat symbolic simulations

Richard Rosing; C. Wang; R. W. Tucker; Andrew Richardson; B. De Masi

doi:10.1117/12.462805

19 April 2002 Generation of MEMS component models using Cosserat symbolic simulations

Richard Rosing, C. Wang, R. W. Tucker, Andrew Richardson, B. De Masi

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462805
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

This paper describes how models of slender MEMS components can be generated using symbolic simulations based on Cosserat theory. Due to the generality of the method, models can be generated for a wide range of components under different stress conditions. The structure of the Cosserat- based models is presented, showing their concise, mathematically accurate representation. This potentially results in faster simulation results than finite element analysis, requiring detailed 3d meshed models. The use of Cosserat models in symbolic simulations enables generation of closed-form expressions for the dynamics of components with complex shapes. The influence of various stress conditions, such as package-induced and residual stress, on the behavior of the component can be included in these expressions.

Citation Download Citation

Richard Rosing, C. Wang, R. W. Tucker, Andrew Richardson, and B. De Masi "Generation of MEMS component models using Cosserat symbolic simulations", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462805

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