Fabrication of optical switch arrays with auto-aligning fibers and latching micromirrors

Hsiharng Yang; Chengtang Pan; S.C. Shen

doi:10.1117/12.462842

19 April 2002 Fabrication of optical switch arrays with auto-aligning fibers and latching micromirrors

Hsiharng Yang, Chengtang Pan, S.C. Shen

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462842
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

This paper presents an innovative device for self-parking in a v-groove and a self-latching vertical mirror on the suspension diaphragm using the out of plane fiber-optical switch array technique. The self-parking offers integrating the optical fiber and mirror within the same optical switch. The self-latching vertical mirror is supported on the suspension diaphragm by four cantilever beams. The theoretical analysis includes a dynamic simulation using the ANSYS software and corner compensation using the IntelliCAD software. The fabrication process consists of wet etching mircromachining, lithography, and excimer laser ablation. This proposed process is simpler than those proposed in other works. An electrostatic driving voltage is used to operate the optical switch. The mirror is made of a photoresist coating with gold film as the switching element. The reflectivity of the gold film mirror is higher than 85% using a wavelength of 1310nm. The micro-optical switch has a maximum of displacement of 48 micrometers and the switching time is below 0.4 ms with a driving voltage of 100 VDC.

Citation Download Citation

Hsiharng Yang, Chengtang Pan, and S.C. Shen "Fabrication of optical switch arrays with auto-aligning fibers and latching micromirrors", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462842

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
9 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Mirrors

Switches

Optical fibers

Optical switching

Etching

Excimer lasers

Semiconducting wafers

Show All Keywords

Keywords/Phrases

Search In:

Publication Years