Low-cost thermal flow sensor for home-appliances applications

N. Sabate; Isabel Gracia; Carles Cane; J. Berganzo; J. Puicorbe; Juan Ramon Morante

doi:10.1117/12.462855

19 April 2002 Low-cost thermal flow sensor for home-appliances applications

N. Sabate, Isabel Gracia, Carles Cane, J. Berganzo, J. Puicorbe, Juan Ramon Morante

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462855
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

A gas flow sensor has been developed for home-appliances applications. The main requirements were to obtain a low cost single device able to work in the range 0-1slm with high linearity, low power, reliability and robustness. A thermal flow sensor has been designed with the help of thermal and flow FEM simulation for the design of the sensor chip as well as its packaging. The process flow is based on a simple silicon micromachined technology. Chip-on-board solution has been selected to simplify the packaging. Electronics for driving the sensor and for compensation offsets and temperature dependence and for linearising the output signal has been implemented. Final device shows good sensitivity and linearity in different zones of the range of interest.

Citation Download Citation

N. Sabate, Isabel Gracia, Carles Cane, J. Berganzo, J. Puicorbe, and Juan Ramon Morante "Low-cost thermal flow sensor for home-appliances applications", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462855

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