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Proceedings Article

Diode-pumped TEM00 mode solid state lasers and their micromachining applications

[+] Author Affiliations
Norman Hodgson, Mingwei Li, Andy Held, Arnd K. Krueger

Spectra-Physics, Inc. (USA)

Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, 281 (July 18, 2003); doi:10.1117/12.479574
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From Conference Volume 4977

  • Photon Processing in Microelectronics and Photonics II
  • Alberto Pique; Koji Sugioka; Peter R. Herman; Jim Fieret; Friedrich G. Bachmann; Jan J. Dubowski; Willem Hoving; Kunihiko Washio; David B. Geohegan; Frank Traeger; Kouichi Murakami
  • San Jose, CA | January 25, 2003

abstract

During the last decade, diode-pumped TEM00 mode solid state lasers have gained widespread application in micromachining of dielectrics and metals. Commercial systems with output powers of up to 40W at 1064nm, 20W at 532nm, 15W at 355nm and 2W at 266nm, repetition rates of up to 400kHz and pulse durations between 10ns and 100ns are now being used in numerous micromachining applications. In addition, industrial applications of modelocked lasers are starting to emerge. This paper will give an overview of the state-of the art of diode-pumped TEM00 mode solid state lasers and their applications in micromachining.

© (2003) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Norman Hodgson ; Mingwei Li ; Andy Held and Arnd K. Krueger
"Diode-pumped TEM00 mode solid state lasers and their micromachining applications", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, 281 (July 18, 2003); doi:10.1117/12.479574; http://dx.doi.org/10.1117/12.479574


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