High-quality laser microdrilling of metals and ceramics with maximum aspect ratio

Alexander Binder; Thomas Metzger; Holger Kern; David Ashkenasi; Gerhard J. Mueller; Thomas Riesbeck; Hans Joachim Eichler

doi:10.1117/12.479235

17 October 2003 High-quality laser microdrilling of metals and ceramics with maximum aspect ratio

Alexander Binder, Thomas Metzger, Holger Kern, David Ashkenasi, Gerhard J. Mueller, Thomas Riesbeck, Hans Joachim Eichler

Author Affiliations +

Proceedings Volume 4977, Photon Processing in Microelectronics and Photonics II; (2003) https://doi.org/10.1117/12.479235
Event: High-Power Lasers and Applications, 2003, San Jose, CA, United States

Abstract

To meet the industry's demand for reducing machine cycle lengths concerning laser-drilling a Nd:YAG Master-Oscillator Power-Amplifier (MOPA)-system was developed at the LMTB-laboratories that emits high-power peak-pulses at excellent beam-quality. Presently, the output power of the oscillator (10W@1064nm) with a beam-quality of M²=1.3 is amplified to 95W@1064nm with M²=2.3 and a single pulse energy up to 500mJ. The pulse duration can be varied between 26 and 230ns. On account of the excellent beam quality, frequency conversion resulted in 49W@532nm and 4.8@266nm. The MOPA-System is used for laser micro drilling experiments into metals and ceramics where the influence of the beam quality on the geometrical shape of the hole is investigated and compared with applications conducted with similar laser systems. Additionally means in optimizing the drilling process such as burr-minimizing and melt-reduction were introduced. Furthermore, experiments using tapered drilling technique are undertaken. A maximum aspect ratio of 1:200 in stainless steel was obtained.

Citation Download Citation

Alexander Binder, Thomas Metzger, Holger Kern, David Ashkenasi, Gerhard J. Mueller, Thomas Riesbeck, and Hans Joachim Eichler "High-quality laser microdrilling of metals and ceramics with maximum aspect ratio", Proc. SPIE 4977, Photon Processing in Microelectronics and Photonics II, (17 October 2003); https://doi.org/10.1117/12.479235

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