Novel MEMS-technology-based silicon and polymer hybrid actuator and applications as a tunable filter in telecom and in IR chemical detectors

Ping Li; Kusol Lee; Weijie Wang; Jon Peters

doi:10.1117/12.478293

15 January 2003 Novel MEMS technology based silicon and polymer hybrid actuator and applications as a tunable filter in telecom and in IR chemical detector

Ping Li, Kusol Lee, Weijie Wang, Jon Peters

Author Affiliations +

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.478293
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

This paper presents a compliant-MEMS technology based silicon-polymer hybrid actuator and its applications to tunable optical filters for DWDM Optical Performance Monitoring (OPM), tunable external cavity lasers, Optical Spectrum Analyzers (OSA) and Infra Red (IR) chemical detectors. The C-MEMS technology provides wider tuning range, tailored spring force and low manufacturing cost. The advantages of C-MEMS technology rely on selecting optimum materials for the functioning components. The Fabry-Perot filter, TFM-2000 achieves performance of 2000 plus finesse over 40 nm tuning range with 1.5 dB insertion loss, which is better than any single pass tunable filter on the market. Fabrication processes are discussed.

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Ping Li, Kusol Lee, Weijie Wang, and Jon Peters "Novel MEMS technology based silicon and polymer hybrid actuator and applications as a tunable filter in telecom and in IR chemical detector", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.478293

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