Design rules for the fabrication of binary half-tone masks used for MEMS and photonic devices

Peter D. Rhyins; Christopher J. Progler; Glenn S Claydon; Ernest W Balch

doi:10.1117/12.478283

15 January 2003 Design rules for the fabrication of binary half-tone masks used for MEMS and photonic devices

Peter D. Rhyins, Christopher J. Progler, Glenn S Claydon, Ernest W Balch

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.478283
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Gray scale lithography is becoming a popular technique for producing three-dimensional structures needed in fabricating photonics and MEMS devices. The structures are printed using a variable transmission mask to yield the required continuous tone intensity during image formation. In binary half tone imaging (i.e., BHT), the transmission through the mask is adjusted by varying the open area of sub-patterns. Design rules, fabrication tradeoffs and a layout methodology employing a novel primitive cell to aid in constructing the BHT masks are discussed Simulation is leveraged to tie the BHT design with expected imaging results. The overall process is exercised by fabricating a specific grayscale design for use in a photonic application. The BHT mask approach to gray scale lithography is a viable method to fabricate three-dimensional images offering MEMS and photonics communities a cost effective alternative to gray scale masks which rely on specialty materials and films.

Citation Download Citation

Peter D. Rhyins, Christopher J. Progler, Glenn S Claydon, and Ernest W Balch "Design rules for the fabrication of binary half-tone masks used for MEMS and photonic devices", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.478283

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available