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Proceedings Article

In-line optical surface roughness determination by laser scanning

[+] Author Affiliations
Gregory Toker

Amsys, Ltd. (Israel)

Andrei Brunfeld

Amsys, Ltd. (USA)

Joseph Shamir, Boris Spektor

Technion--Israel Institute of Technology (Israel)

Evan F. Cromwell, Johann F. Adam

Consultant (USA)

Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, 323 (June 20, 2002); doi:10.1117/12.472232
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From Conference Volume 4777

  • Interferometry XI: Techniques and Analysis
  • Katherine Creath; Joanna Schmit
  • Seattle, WA | July 07, 2002

abstract

Reliable in-line and in-situ measurement of structure of highly polished surfaces remains a major challenge for the modern industry. Evaluation of the wavefront of a scanning laser beam reflected from a surface allows one to establish a direct correlation between the statistics of the optical signal and the surface roughness. Phase structuring of the laser beam greatly increases the height sensitivity down to the nanometer level. High sampling rate allows one to collect a very large number of sampled data and provide a complete analysis of the surface structure rather than a single parameter such as the rms roughness.

© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Gregory Toker ; Andrei Brunfeld ; Joseph Shamir ; Boris Spektor ; Evan F. Cromwell, et al.
"In-line optical surface roughness determination by laser scanning", Proc. SPIE 4777, Interferometry XI: Techniques and Analysis, 323 (June 20, 2002); doi:10.1117/12.472232; http://dx.doi.org/10.1117/12.472232


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