Paper
19 June 2002 Interferometric testing of refractive microcylinder lenses
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Abstract
Micro-cylinder lenses are used in beam shaping applications for laser light emitted by semiconductor laser bars. The radiation pattern is extremely asymmetric concerning the angle characteristic. There is a fast and a slow axis of the radiation field. The micro-cylinder lenses are mainly used to correct the fast axis field which makes high numerical aperture lenses necessary. The interferometric test of such fast cylinder lenses is rather involved especially since a deviation from circular symmetry of the meridian curve is mandatory in order to correct the on-axis aberrations. There is a need for surface testing during the manufacture process and performance testing in the final use of the lenses. Surface testing should be done in reflected light. We propose the use of a grazing incidence interferometer based on two diffractive optical elements as beam splitter and beam shaper. With this method arbitrary cylindrical surfaces can be measured with a repeatability of about 10nm rms. The performance test relies on interferometric measurements in transmitted light. To enable a null test a null lens or a diffractive null element is necessary. We report on a null test in transmitted light using a high aperture diffractive element at a wavelength of 780 nm.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Johannes Schwider and Juergen Lamprecht "Interferometric testing of refractive microcylinder lenses", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473538
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KEYWORDS
Diffractive optical elements

Interferometers

Lenses

Beam shaping

Interferometry

Optical testing

Wavefronts

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