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Proceedings Article

Absolute distance measurements using FTPSI with a widely tunable IR laser

[+] Author Affiliations
Leslie L. Deck

Zygo Corp. (USA)

Proc. SPIE 4778, Interferometry XI: Applications, 218 (June 19, 2002); doi:10.1117/12.473544
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From Conference Volume 4778

  • Interferometry XI: Applications
  • Wolfgang Osten
  • Seattle, WA | July 07, 2002

abstract

Fourier transform phase-shifting interferometry is further developed and applied to the absolute measurement of interferometer cavities. Using a widely tunable IR laser diode initially developed for telecom applications along with specific interferometer cavities, I apply this new capability to the measurement of absolute cavity lengths, where a 1-(sigma) precision of 12.6 ppb is demonstrated and the technique was then used to determinate the absolute index and thickness of a transparent parallel plate.

© (2002) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Leslie L. Deck
"Absolute distance measurements using FTPSI with a widely tunable IR laser", Proc. SPIE 4778, Interferometry XI: Applications, 218 (June 19, 2002); doi:10.1117/12.473544; http://dx.doi.org/10.1117/12.473544


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