Paper
19 June 2002 Measurement of surface shape and deformation by phase-shifting image digital holography
Ichirou Yamaguchi, Jun-ichi Kato, Hirokazu Matsuzaki
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Abstract
Measurement of shape and deformation of diffusely reflecting surfaces by phase-shifting digital holography is presented that uses an imaging setup. The difference of the reconstructed phases before and after tilt of the object illumination beam provides the contour lines of the surface height, while that before and after object deformation delivers those of object displacement. This method enables measurements of both surface shape and deformation of 3D object of various sizes with the same optical system and the processing software. Suppression of speckle noise is also discussed.
© (2002) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ichirou Yamaguchi, Jun-ichi Kato, and Hirokazu Matsuzaki "Measurement of surface shape and deformation by phase-shifting image digital holography", Proc. SPIE 4778, Interferometry XI: Applications, (19 June 2002); https://doi.org/10.1117/12.473542
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Digital holography

Phase shifts

Speckle

Digital imaging

Imaging systems

Charge-coupled devices

Interferometry

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