Recent developments of multilayer mirror optics for laboratory x-ray instrumentation

Carsten Michaelsen; Jörg Wiesmann; C. Hoffmann; K. Wulf; Lutz Brugemann; A. Storm

doi:10.1117/12.469363

24 December 2002 Recent Developments of Multilayer Mirror Optics for Laboratory X-ray Instrumentation

Carsten Michaelsen, Jörg Wiesmann, C. Hoffmann, K. Wulf, Lutz Brugemann, A. Storm

Proceedings Volume 4782, X-Ray Mirrors, Crystals, and Multilayers II; (2002) https://doi.org/10.1117/12.469363
Event: International Symposium on Optical Science and Technology, 2002, Seattle, WA, United States

Abstract

In this paper we review various improvements that we made in the development of multilayer mirror optics for home-lab x-ray analytical equipment in recent years. For the detection of light elements using x-ray fluorescence spectrometry, we developed a number of new multilayers with improved detection limits. In detail, we found that La/B4C multilayers improve the detection limit of boron by 29 % compared to the previous Mo/B₄C multilayers. For the detection of carbon, TiO₂/C multilayers improve the detection limit also by 29 % compared to the V/C multilayers previously used. For the detection of aluminum, WSi₂/Si or Ta/Si multilayers can lead to detection limit improvements over the current W/Si multilayers of up to 60 % for samples on silicon wafers. For the use as beam-conditioning elements in x-ray diffractometry, curved optics coated with laterally d-spacing graded multilayers give rise to major improvements concerning usable x-ray intensity and beam quality. Recent developments lead to a high quality of these multilayer optics concerning beam intensity, divergence, beam uniformity and spectral purity. For example, x-ray reflectometry instruments equipped with such multilayer optics have dynamic ranges previously only available at synchrotron sources. Two-dimensional focusing multilayer optics are shown to become essential optical elements in protein crystallography and structural proteomics.

Citation Download Citation

Carsten Michaelsen, Jörg Wiesmann, C. Hoffmann, K. Wulf, Lutz Brugemann, and A. Storm "Recent Developments of Multilayer Mirror Optics for Laboratory X-ray Instrumentation", Proc. SPIE 4782, X-Ray Mirrors, Crystals, and Multilayers II, (24 December 2002); https://doi.org/10.1117/12.469363

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