Optical holography used in optical microlithography

Boru Feng; Jin Zhang; Desheng Hou; Fen Chen

doi:10.1117/12.389082

5 July 2000 Optical holography used in optical microlithography

Boru Feng, Jin Zhang, Desheng Hou, Fen Chen

Proceedings Volume 4000, Optical Microlithography XIII; (2000) https://doi.org/10.1117/12.389082
Event: Microlithography 2000, 2000, Santa Clara, CA, United States

Abstract

A ne optical microlithography - optical holographic microlithography is described in the paper. The primary principle, hologram repositioning, main advantages, basic applications and some experimental system aspects of the optical holographic microlithography are also described.

Citation Download Citation

Boru Feng, Jin Zhang, Desheng Hou, and Fen Chen "Optical holography used in optical microlithography", Proc. SPIE 4000, Optical Microlithography XIII, (5 July 2000); https://doi.org/10.1117/12.389082

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