Progress and profit through microtechnologies: commercial applications of MEMS/MOEMS

Wolfgang Ehrfeld; Ursula Ehrfeld

doi:10.1117/12.442943

28 September 2001 Progress and profit through microtechnologies: commercial applications of MEMS/MOEMS

Wolfgang Ehrfeld, Ursula Ehrfeld

Proceedings Volume 4557, Micromachining and Microfabrication Process Technology VII; (2001) https://doi.org/10.1117/12.442943
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Micro technology deals with miniaturization and integration in all areas of technology outside of microelectronics like micro mechanics, micro optics, micro acoustics, micro fluid technology, micro reaction technology and further disciplines which are focused on technical components and systems with characteristic dimensions in the micrometer range. Within a period of about ten years a multi-billion dollar market has been set up with many products for daily life. The growth rate of the market of micro technology will remain on a high level for the years to come. Mega trends resulting from fundamental human wishes for health, information, mobility and sustainable development are creating a further growing basis for micro technical products. A broad spectrum of production processes and materials has been developed to meet the requirements of a strongly diversified range of applications. For the development of new components and systems the importance of software tools for simulation of functional properties, production processes and comprehensive optimization is growing rapidly. Micro devices are meanwhile used extensively in information, automotive, and medical technologies. In addition, micro technology is generating a completely novel basis for chemical engineering, life sciences, industrial automation and optical communication, to mention only a few disciplines where future innovation will be dominated by miniaturization.

Citation Download Citation

Wolfgang Ehrfeld and Ursula Ehrfeld "Progress and profit through microtechnologies: commercial applications of MEMS/MOEMS", Proc. SPIE 4557, Micromachining and Microfabrication Process Technology VII, (28 September 2001); https://doi.org/10.1117/12.442943

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