Three-dimensional simulation of micropumps

Yuan Xu; Yen-Peng Kong; Xuanxiong Zhang; Kui Yao; Wen On Choong; Francis Eng Hock Tay; Wen Ping Wang

doi:10.1117/12.443071

28 September 2001 Three-dimensional simulation of micropumps

Yuan Xu, Yen-Peng Kong, Xuanxiong Zhang, Kui Yao, Wen On Choong, Francis Eng Hock Tay, Wen Ping Wang

Proceedings Volume 4560, Microfluidics and BioMEMS; (2001) https://doi.org/10.1117/12.443071
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

A 3D model of one type of micro pumps was supposed and analyzed using finite element method (FEM). The pump had square shape cavity and was driven by a square shape PZT component. The finite element analysis (FEA) took into consideration of the effects of PZT component dimensions, membrane thickness, pump chamber pressure and other geometric parameters. Modal analyses were also conducted. Compression ratio of the pump chamber was taken as the prime parameter for the analyses. It was found that the membrane thickness and the PZT plate thickness played major roles in determining the compression ratio. For each membrane thickness, there was always an optimum PZT plate thickness that gave the maximum compression ratio. Curves showing the relationship between the optimum PZT plate thickness and the membrane thickness at different chamber pressures were given, based on the FEA results. A set of optimum pump design parameters was proposed.

Citation Download Citation

Yuan Xu, Yen-Peng Kong, Xuanxiong Zhang, Kui Yao, Wen On Choong, Francis Eng Hock Tay, and Wen Ping Wang "Three-dimensional simulation of micropumps", Proc. SPIE 4560, Microfluidics and BioMEMS, (28 September 2001); https://doi.org/10.1117/12.443071

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