Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

PLZT-based electro-optic modules for micromachined biophotonics systems

[+] Author Affiliations
Yasser A. Abdelaziez, Chong H. Ahn

Univ. of Cincinnati (USA)

Proc. SPIE 4561, MOEMS and Miniaturized Systems II, 171 (October 2, 2001); doi:10.1117/12.443110
Text Size: A A A
From Conference Volume 4561

  • MOEMS and Miniaturized Systems II
  • M. Edward Motamedi; Rolf Goering
  • San Francisco, CA | October 22, 2001

abstract

In this paper we present the development and characterization of Lanthanum modified Lead Zirconate Titanate (PLZT)-based Electro-optic (EO) devices for micromacined bio-photonics systems. Spatial light modulator and Dynamic programmable microlens array have been designed, fabricated and initial results have been obtained for such applications. Fully integrating light sources, detectors and dynamic filtering in recently emerging bio-photonics and Capillary Electrophoresis (CE) systems is of immediate need. An optical module that contains such devices was made using microfabrication technologies on the optically active PLZT ceramic wafer. A PLZT wafer was polished and sandwiched and bonded between 2 plastic wafers to form such optical module. Laser micromachining was implemented to etch precise, and well aligned via holes in the plastic wafers to provide windows for light sources and electrical connections to our devices. The electro-optic coefficient for the PLZT was measured in the longitudinal configuration, where light propagates in the direction of the applied field. A mathematical expression was derived for the lens effect on the far field diffraction pattern of the dynamic microlens. Such diffraction pattern can be used to measure the focal length variation with the applied voltage. Preliminary results show the variation of focal lens with the applied voltage that ranges from 50 to 300 volts.

© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Yasser A. Abdelaziez and Chong H. Ahn
"PLZT-based electro-optic modules for micromachined biophotonics systems", Proc. SPIE 4561, MOEMS and Miniaturized Systems II, 171 (October 2, 2001); doi:10.1117/12.443110; http://dx.doi.org/10.1117/12.443110


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.