Full Content is available to subscribers

Subscribe/Learn More  >
Proceedings Article

Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation

[+] Author Affiliations
Taras V. Kononenko, Sergei M. Klimentov, Vitali I. Konov, P. A. Pivovarov, Serge V. Garnov

General Physics Institute (Russia)

Friedrich Dausinger, Detlef Breitling

Univ. Stuttgart (Germany)

Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, 248 (June 29, 2001); doi:10.1117/12.432516
Text Size: A A A
From Conference Volume 4274

  • Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
  • Malcolm C. Gower; Henry Helvajian; Koji Sugioka; Jan J. Dubowski
  • San Jose, CA | January 20, 2001

abstract

Experiments on deep drilling of steel by 300 ps, 1 ps and 125 fs laser pulses are reported. The ablation rate dependence on the channel depth was studied and energy losses in through channels for different radiation parameters were measured. The low-threshold cluster-assisted air breakdown was revealed to play an important role in ablation by 300 ps pulses. The ablated particles remaining inside the channel between laser shots provide substantial reduction of the air breakdown threshold. Laser-induced spark produces noticeable shielding effect and, presumably, is main reason of observed deep channel widening. Pronounced strengthening of light shielding by laser-induced spark was observed under steel target ablation comparing with pure air without target for ultrashort (125 fs, 1 ps) laser pulses. The dramatic reduction of the drilling rate in deep channels was observed for all examined pulsewidths. In the case of 300 ps pulses, the drilling rate falls down sharply by two order of magnitude at a certain critical channel depth increasing with the incident laser fluence. It was found that the integral plasma transmittance (breakdown plus ablation) remains unchanged when the drilling rate decreases.

© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Citation

Taras V. Kononenko ; Sergei M. Klimentov ; Vitali I. Konov ; P. A. Pivovarov ; Serge V. Garnov, et al.
"Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, 248 (June 29, 2001); doi:10.1117/12.432516; http://dx.doi.org/10.1117/12.432516


Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).

Figures

Tables

NOTE:
Citing articles are presented as examples only. In non-demo SCM6 implementation, integration with CrossRef’s "Cited By" API will populate this tab (http://www.crossref.org/citedby.html).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Proceeding
Sign in or Create a personal account to Buy this proceeding ($15 for members, $18 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.