Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation

Taras V. Kononenko; Sergei M. Klimentov; Vitali I. Konov; P. A. Pivovarov; Serge V. Garnov; Friedrich Dausinger; Detlef Breitling

doi:10.1117/12.432516

29 June 2001 Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation

Taras V. Kononenko, Sergei M. Klimentov, Vitali I. Konov, P. A. Pivovarov, Serge V. Garnov, Friedrich Dausinger, Detlef Breitling

Author Affiliations +

Proceedings Volume 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI; (2001) https://doi.org/10.1117/12.432516
Event: Photonics West 2001 - LASE, 2001, San Jose, CA, United States

Abstract

Experiments on deep drilling of steel by 300 ps, 1 ps and 125 fs laser pulses are reported. The ablation rate dependence on the channel depth was studied and energy losses in through channels for different radiation parameters were measured. The low-threshold cluster-assisted air breakdown was revealed to play an important role in ablation by 300 ps pulses. The ablated particles remaining inside the channel between laser shots provide substantial reduction of the air breakdown threshold. Laser-induced spark produces noticeable shielding effect and, presumably, is main reason of observed deep channel widening. Pronounced strengthening of light shielding by laser-induced spark was observed under steel target ablation comparing with pure air without target for ultrashort (125 fs, 1 ps) laser pulses. The dramatic reduction of the drilling rate in deep channels was observed for all examined pulsewidths. In the case of 300 ps pulses, the drilling rate falls down sharply by two order of magnitude at a certain critical channel depth increasing with the incident laser fluence. It was found that the integral plasma transmittance (breakdown plus ablation) remains unchanged when the drilling rate decreases.

Citation Download Citation

Taras V. Kononenko, Sergei M. Klimentov, Vitali I. Konov, P. A. Pivovarov, Serge V. Garnov, Friedrich Dausinger, and Detlef Breitling "Propagation of short-pulsed laser radiation and stages of ablative deep-channel formation", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432516

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available