Modeling of optical mirror and electromechanical behavior

Fang Wang; Chao Lu; Zishun Liu; Ai Qun Liu; Xu Ming Zhang

doi:10.1117/12.445082

18 October 2001 Modeling of optical mirror and electromechanical behavior

Fang Wang, Chao Lu, Zishun Liu, Ai Qun Liu, Xu Ming Zhang

Proceedings Volume 4582, Optical Switching and Optical Interconnection; (2001) https://doi.org/10.1117/12.445082
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China

Abstract

This paper presents finite element (FE) simulation and theoretical analysis of novel MEMS fiber-optical switches actuated by electrostatic attraction. FE simulation for the switches under static and dynamic loading are first carried out to reveal the mechanical characteristics of the minimum or critical switching voltages, the natural frequencies, mode shapes and response under different levels of electrostatic attraction load. To validate the FE simulation results, a theoretical (or analytical) model is then developed for one specific switch, i.e., Plate_40_104. Good agreement is found between the FE simulation and the analytical results. From both FE simulation and theoretical analysis, the critical switching voltage for Plate_40_104 is derived to be 238 V for the switching angel of 12 degree(s). The critical switching on and off times are 431 microsecond(s) and 67 microsecond(s) , respectively. The present study not only develops good FE and analytical models, but also demonstrates step by step a method to simplify a real optical switch structure with reference to the FE simulation results for analytical purpose. With the FE and analytical models, it is easy to obtain any information about the mechanical behaviors of the optical switches, which are helpful in yielding optimized design.

Citation Download Citation

Fang Wang, Chao Lu, Zishun Liu, Ai Qun Liu, and Xu Ming Zhang "Modeling of optical mirror and electromechanical behavior", Proc. SPIE 4582, Optical Switching and Optical Interconnection, (18 October 2001); https://doi.org/10.1117/12.445082

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